Contact probe and relative probe head of an apparatus for testing electronic devices

ABSTRACT

A contact probe comprises a probe body being extended in a longitudinal direction between respective end portions adapted to realize a contact with respective contact pads, at least one end portion having transverse dimensions greater than the probe body. Suitably, the end portion comprises at least one indentation adapted to house a material scrap being on the contact probe after a separation from a substrate wherein the contact probe has been realized.

BACKGROUND Technical Field

The present disclosure refers to a contact probe and to a correspondingprobe head of an apparatus for testing electronic devices, moreparticularly to a contact probe and to a probe head of an apparatus fortesting electronic devices that are integrated on a wafer and thefollowing disclosure is made referring to this field of application withthe sole aim of simplifying the presentation thereof.

Description of the Related Art

As it is well known, a probe head is a device adapted to electricallyconnect a plurality of contact pads of a microstructure, in particularan electronic device that is integrated on a wafer, with correspondingchannels of a testing machine that performs the functionality testing,in particular electric, thereof, or the test, generically.

The test, which is performed on integrated devices, is particularlyuseful in detecting and isolating defective circuits as early as in theproduction phase. Normally probe heads are therefore employed forelectric tests of devices integrated on wafers before cutting andassembling them inside a chip containment package.

Generally, a probe head comprises a plurality of movable contactelements or probes retained by at least one pair of plates or dies thatare substantially plate-shaped and parallel to each other. Said dies areprovided with suitable holes and are arranged at a certain distance fromeach other in order to leave a free space or air gap for the movementand possible deformation of the contact probes. In particular, the pairof dies comprises an upper die and a lower die, both provided with guideholes within which the contact probes axially slide, usually made ofwires of special alloys with good electrical and mechanical properties.

Good connection between the contact probes and the contact pads of thedevice under test is ensured by pressing the probe head on the deviceitself, the contact probes, which are movable within the guide holesmade in the upper and lower dies, undergoing, during that pressingcontact, a bending inside the air gap between the two dies and a slidinginside such guide holes. Probe heads of this kind are commonly calledprobe heads with vertical probes and indicated with the English term:“Vertical probe head”.

In particular, FIG. 1 schematically shows a probe head 10 comprising atleast one lower plate-shaped support or die 2 and an upper plate-shapedsupport or die 3, having respective guide holes 2A and 3A within whichat least one contact probe 1 slides.

It is pointed out that, for convenience, here and hereinafter the terms“upper” and “lower” have been used in connection with a local referencesystem of the figure, without considering them limitative.

The contact probe 1 has at least one end portion or contact tip 1Aintended to abut onto a contact pad 4A of a device under test 4, so asto realize the mechanical and electrical contact between said deviceunder test 4 and a test apparatus (not shown) of which such a probe head10 forms an end element.

Here and hereinafter the term “contact tip” means an end zone or regionof a contact probe intended to contact pads, said contact zone or regionnot being necessarily sharpened.

In some cases, the contact probes are fixedly fastened to the headitself in correspondence of the upper die: such probe heads are referredto as “blocked probe heads”.

More frequently, however, probe heads are used with unblocked probes,i.e. probes not fixedly fastened, but held interfaced to a board througha micro-contact board: such probe heads are referred to as “unblockedprobe heads”. The micro-contact board is usually called “spacetransformer” since, besides contacting the probes, it also allowsspatially redistributing the contact pads realized thereon with respectto the contact pads on the device under test, in particular relaxing thedistance constraints between the centers of the pads themselves.

In this case, as shown in FIG. 1, the contact probe 1 has a further endportion or contact head 1B towards a contact pad 5A of such a spacetransformer 5. Good electrical contact between probes 1 and spacetransformer 5 is ensured by pressing the contact heads 1B of the contactprobes 1 onto the contact pads 5A of the space transformer 5 analogouslyto the contact with the device under test 4.

The lower die 2 and the upper die 3 are suitably spaced by an air gap 6that allows the deformation of the contact probes 1. Finally, the guideholes 2A and 3A are sized so as to allow a sliding of the contact probe1 therein.

More in particular, during the pressing contact of the contact tips 1Aor of the contact heads 1B of the probes 1 on the contact pads 4A and 5Aof the device under test 4 and of the space transformer 5, respectively,the probe 1 slides in the guide holes 2A and 3A and gets deformed incorrespondence of the air gap 6.

The shape of the deformation undergone by the probes and the forcerequired to produce such a deformation depend on several factors, suchas the physical characteristics of the alloy which the probes are madeof and the value of the offset between the guide holes in the upper dieand the corresponding guide holes in the lower die.

The correct working of a probe head is basically linked to twoparameters: the vertical movement, or overtravel, of the contact probesand the horizontal movement, or scrub, of the contact tips of suchcontact probes. As known, it is important to ensure a suitable scrub ofthe contact tips so as to allow “scrubbing” the surface of the contactpads, in this way removing the impurities that are for example in theform of a thin layer or oxide film, thus improving the contact carriedout by the probe head.

All these features should be evaluated and calibrated in themanufacturing step of a probe head since the good electrical connectionbetween probes and device under test should always be ensured. In caseof a testing head manufactured with the so-called “shifted plates”technology, the contact probes 1, which are also referred to as“buckling beam”, are made straight, with a constant cross-sectionthroughout their length, preferably rectangular, and usually they aresharpened at their ends in order to form the contact ends portions, inparticular the contact tip 1A and the contact head 1B respectively, asshown in FIG. 1. It is thus known to provide, for this kind of probeheads, a shift between the lower die 2 and the upper die 3 in order tocause a deformation of the probe body, in a substantially centralposition, as in the example shown. These probe heads are also referredto as “shifted-plate probe heads”.

A critical parameter in the probe head manufacturing is the distance(the so-called pitch) between centers of contact pads on the deviceunder test. In fact, the pitch of the integrated electronic devices,with the progress of the relative manufacturing technologies, has becomesmaller and smaller, forcing a high packing of the contact probes in theprobe head and causing positioning problems when the mutual contactbetween contact probes is to be avoided.

In the most recent technologies, the distance between the centers ofcontact pads on the integrated devices, usually indicated as pitch, hasdecreased up to values comprised between 30 μm and 80 μm. This pitchdecrease affects configurations of the matrix type pads in anincreasingly pressing manner. In this case, the distances both betweencontact centers of pads on a same line and between contact centers ofpads on a same column have decreased up to values comprised between 30μm and 80 μm.

As already said, this decrease in the pitch value of contact padsconfigurations of the devices under test of the most recentmanufacturing causes problems connected to the contact between adjacentprobes, and in particular between protruding portions thereof.

This problem is strongly felt when the contact probe 1 has at least oneenlarged portion in correspondence of one end portion, in particular ofthe contact head 1B, essentially used to ensure that the probe cannotslip out of the corresponding guide holes realized in the upper andlower dies of the probe head and thus having greater dimensions than therest of the contact probe, in particular at least one diameter greaterthan the diameter of the probe body, diameter meaning the maximumdimension of such cross-sections.

Just the increased dimensions of the enlarged portions of the contactprobes exacerbate the above-mentioned packing problems, thusdramatically limiting the chance of approaching adjacent probes incorrespondence of such portions, where the contact between adjacentprobes is more likely, with respect to a longitudinal or transversedirection respectively, than a matrix distribution of the pads of theintegrated device under test.

In other terms, while designing the contact probes and the probe headcomprising them, it will be necessary to also consider a minimum valueof the distance between adjacent probes, in particular in correspondenceof the enlarged portions thereof, for instance the portions of thecontact heads. Such a minimum distance, suitable to avoid the contactbetween adjacent probes, will obviously affect the distance or pitch ofthe contact pads of a device which the probe head will be able to test.It will be furthermore possible to provide equal or different minimumdistance values for the longitudinal or transverse direction.

It is also known that the involved dimensions for such contact probesare extremely binding for the manufacturing methods of the contactprobes. In particular, in the field of testing the most recentmanufactured integrated circuits, the extremely reduced distance betweenthe contact pads of the devices under test and consequently between thecontact probes of the relative probe heads has challenged thedimensional limits of the traditional manufacturing methods of contactprobes, which use in particular photolithographic, masking, growth andattack techniques.

Therefore, in recent years the interest in manufacturing methods ofcontact probes for probe heads using the laser technology has increased.

In particular, a manufacturing method by laser cutting which allowsobtaining contact probes by “cutting out” a metal sheet in the finaldesired form for the probes usually comprises the steps of:

-   -   providing a substrate 11 made of a conductive material, as shown        in FIG. 2A; and    -   defining each contact probe 10 by laser cutting according to a        contour 10C desired for such a probe, as shown in dashed line in        FIG. 2B.

In particular, as shown in FIG. 2C, the method provides the definitionby laser cutting a plurality of contact probes 10 in the substrate 11,each of them provided with respective end portions 10A and 10B, meant asportions comprising a contact tip 10A or a contact head 10B of thecontact probe 10, and extending according to a longitudinal developmentdirection of the substrate 11, in particular a vertical direction Y asindicated in FIG. 2C.

The shape shown in the figures for contact tips 10A and contact heads10B is absolutely arbitrary, since they can also have the same shape ordifferent shapes from the illustrated ones.

Usually, the definition step realizes each contact probe 10 inside acorresponding frame 12 so as to be anchored to the substrate 11 throughat least one relative material bridge 13, as schematically shown in FIG.3A and in the enlargement of FIG. 3B.

Therefore, the method comprises a further separation step for separatingthe contact probes 10 from the substrate 11 by breaking the materialbridges 13.

In particular, in the example shown in FIGS. 3A and 3B, each contactprobe 10 has only one material bridge 13 that connects and holds it tothe substrate 11 inside the corresponding frame 12, said material bridge13 being realized in correspondence of one portion of the probe that isdistinct from an end portion.

It is obviously possible to realize any number of material bridges 13,also located in other points of the contact probe 10 with respect towhat is shown in FIGS. 3A and 3B, in a totally arbitrary manner.

For instance, as schematically shown in FIGS. 4A and 4B, it is possibleto realize each contact probe 10 so as to be anchored to the substrate11 still by a single material bridge 13, in this case realized incorrespondence of its contact head 10B in a preferably side position. Inthis way, in fact, the material bridge 13 is in a position of thecontact probe 10 having greater dimensions than the rest of the probe,namely in an area with a better mechanical seal, in particular useful atthe moment of the separation of the contact probe 10 from the substrate11 by breaking the material bridge 13 itself.

Furthermore, said positioning of the material bridge 13 prevents scrapsand surface irregularities from being left in portions of the contactprobe 10 that must slide in the guide holes of the upper or lower guidesduring the operation of a probe head that comprises such contact probes10, as previously shown.

Indeed, it is well known that the breaking of the material bridges 13during the separation of the contact probe 10 from the substrate 11involves holding material, being anchored to the contact probe 10 incorrespondence of the attachment of the bridge itself, called scrap andindicated with reference number 14 in FIG. 5. As already indicated, itis possible for this scrap 14 to be in correspondence of the contacthead 10B of the contact probe 10, actually increasing the side footprintthereof and therefore reducing the chances of packing a great number ofprobes thus realized in order not to rick the contact between adjacentprobes, just in correspondence of said scraps 14 located at the contactheads 10B.

It is furthermore usual to realize the contact probes 10 so that theyhave at least two material bridges 13 symmetrically located on the sidesof the corresponding contact head 10B; the separation of said contactprobes 10 from the substrate 11 thus leaves scraps 14 located on bothsides of the contact head 10B.

It is also noticed that a possible contact of adjacent probes incorrespondence of such scraps 14, which are areas having high surfaceroughness, could at least cause such probes to get undesirably stuck,with the definitive loss of functionality of the probe head thatcomprises them.

BRIEF SUMMARY

An embodiment of the present disclosure is directed to a contact probeand a corresponding probe head for the connection with an apparatus fortesting electronic devices, in particular integrated on a wafer, havingstructural and functional features so as to allow overcoming thelimitations and drawbacks which still nowadays affect the systems madeaccording to the prior art, in particular able to reduce theprobabilities of a contact between its enlarged portions, for instancein correspondence of the contact heads of the probes, so as to allow agreater packing of the probes themselves inside the probe head, also forconfigurations of contact pads extremely close to each other, i.e. witha very small pitch.

The contact probe is provided with at least one indentation incorrespondence of one end portion thereof, in particular a contact head,having greater dimensions than the rest of the probe, able to house anattachment scrap to the substrate which the probe has been obtainedfrom, thus decreasing the risk of contact of the probes between eachother once they have been housed in a corresponding probe head, also forconfigurations of contact pads extremely close to each other of a deviceunder test by means of such a probe head.

The contact probe for a probe head for an apparatus for testingelectronic devices comprises a probe body extended in a longitudinaldirection between respective end portions adapted to realize a contactwith respective contact pads, at least one end portion having transversedimensions greater than the probe body, characterized in that the atleast one end portion comprises an indentation adapted to house amaterial scrap being on said contact probe after a separation from asubstrate wherein said contact probe has been realized.

Another embodiment is directed to a contacting element comprisingrespective first and second end portions and a body extended in alongitudinal direction between the first and second end portions, thefirst end portion having transverse dimensions greater than the body,the contacting element comprising material scraps due to a separationfrom a substrate wherein the contacting element is realized, wherein thefirst end portion comprises at least one indentation apt to house thematerial scraps being on the contacting element.

According to another aspect of the disclosure, a probe head for testingelectronic devices is provided, the probe head comprising a plurality ofcontact probes, a first and second plate-shaped supports separated oneanother by a suitable air gap, the first and second plate-shapedsupports having a plurality of guide holes for slidingly housing theplurality of contact probes, wherein each contact probe comprisesrespective first and second end portions and a probe body extended in alongitudinal direction between the first and second end portions, thefirst end portion having transverse dimensions greater than the probebody, the contact probe comprising material scraps due to a separationfrom a substrate wherein the contact probe is realized and the first endportion comprising at least one indentation apt to house the materialscraps being on the contact probe.

The probe head comprises plate-shaped supports that are mutuallysuitably shifted so as to impart to the contact probes, which slide inthe respective guide holes, a pre-deformation in correspondence of theair gap, wherein the enlarged portion of the first end portion of eachof the contact probes protrudes from a wall of the contact probe, whichrests on a wall of the guide hole of the plate-shaped support inproximity of the first end portion.

According to another aspect of the disclosure, the probe head furthercomprises a plurality of symmetrical contact probes, having contactheads which comprise enlarged portions projecting from both the sidewalls of the contact probe and a plurality of asymmetrical contactprobes, having contact heads which comprise only one enlarged portionprojecting from only one side wall of the contact probe, the enlargedportions comprising respective indentations adapted to house materialscraps due to a separation of the contact probes from a substratewherein the contact probes were formed, the symmetrical contact probesbeing arranged in abutment onto contact pads in a first region of thedevice under test having a greater pitch of a second region whereincontact pads are contacted by the asymmetrical contact probes.

The characteristics and advantages of the contact probe and of the probehead according to the disclosure will be apparent from the description,made hereafter, of an embodiment thereof, given by indicative andnon-limiting example, with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 schematically shows a probe head realized according to the priorart;

FIGS. 2A-2C schematically show different steps of the manufacturingmethod by laser cutting;

FIGS. 3A-3B and 4A-4B schematically show alternative embodiments of aplurality of contact probes and corresponding details relating to asingle probe respectively, obtained by means of the method of FIGS.2A-2C;

FIG. 5 schematically shows a contact probe realized according to themethod of FIGS. 2A-2C;

FIGS. 6A and 6B schematically show embodiments of the contact probeaccording to the disclosure;

FIGS. 7A and 7B show respective pluralities of probes obtained by lasercutting and corresponding embodiments of FIGS. 6A and 6B, respectively;

FIG. 8 shows a further embodiment of the contact probe according to thedisclosure;

FIGS. 9A and 9B show respective probe heads according to the presentdisclosure, in particular with vertical probes and shifted plates,comprising contact probes corresponding to the embodiments of FIGS. 6Band 8, respectively;

FIGS. 10A and 10B schematically show different arrangements of a pair ofadjacent contact probes, realized according to the embodiment of FIG. 8;and

FIG. 11 shows a probe head according to the present disclosure, inparticular with vertical probes and shifted plates, comprising contactprobes corresponding both to the embodiment of FIG. 6B and to theembodiment of FIG. 8.

DETAILED DESCRIPTION

With reference to said figures, and in particular to FIG. 6A, referencenumber 20 globally indicates a contact probe for a probe head fortesting electronic devices, in particular integrated on a wafer,according to an embodiment of the present disclosure.

It should be pointed out that the figures represent schematic views ofthe contact probe and of the probe head according to the disclosure andare not drawn to scale, but instead they are drawn so as to enhance theimportant features of the disclosure.

Furthermore, the different aspects of the disclosure represented by wayof example in the figures can obviously be combined with each other andinterchangeable from one embodiment to another.

According to an aspect of the disclosure, the contact probe 20 comprisesa so-called probe body 20C extended between respective end portions, inparticular a contact tip 20A and a contact head 20B. Suitably, at leastone end portion, in particular the contact head 20B, has transversedimensions greater than the probe body 20C. More in particular, thecontact head 20B has a transverse section with a diameter Dt greaterthan a diameter Ds of the transverse section of the probe body 20C,diameter meaning the maximum dimension of such sections.

As already seen in connection with the prior art, in this way, thecontact head 20B allows ensuring that the contact probe 20 cannot slipout of corresponding guide holes realized in guides or dies of thecontact head comprising it, in particular in the absence of a deviceunder test on which the probes abut.

The contact tip 20A of the contact probe 20 is tapered and ends with acontact portion 21A intended to abut onto a contact pad of a deviceunder test; analogously, the contact head 20B has a tapered portionending with a contact portion 21B intended to abut onto a contact pad ofa space transformer, in case of a probe head having non-constrainedprobes.

The contact portions 21A and 21B can be conformed so as to define asubstantially punctiform contact, or can have a rounded shape or still asubstantially flat shape, possibly having a diameter less than the restof the end portion.

More in particular, the contact probe 20B comprises respective enlargedportions 22A and 22B, projecting in correspondence of respective andopposite side walls PLa and PLb of the contact probe 20, and arrangedsymmetrically with respect to a longitudinal development axis HH of thecontact probe 20, the side walls PLa and PLb arranged on the left and onthe right of the probe itself, respectively, in the local reference ofthe figure. In this way, the contact head 20B has a symmetricalconfiguration, with respect to the longitudinal development axis HH ofthe contact probe 20.

In this way the contact probe 20B has respective undercut walls 22 asand 22 bs, in correspondence of the enlarged portions 22A and 22B,adapted to abut onto a corresponding face of a die, in particular anupper die, preventing the contact probe 20 from slipping out of the dieand therefore out of the probe head, for instance when the contact probe20 does not abut onto a corresponding contact pad and tends to slidedownwards, considering the local reference of the figure. More inparticular, the enlarged portions 22A and 22B define undercut walls 22as and 22 bs of equal length Lex having a value equal to 20-60% of thediameter of the probe Ds. In this way, the contact head 20B has afootprint diameter, in particular a head diameter Dt equal to the sum ofthe probe diameter Ds and of the lengths Lex: Dt=Ds+2*Lex.

Suitably according to the present disclosure, the contact head 20B ofthe contact probe 20 also comprises at least one indentation 23Aarranged in correspondence of at least one of the enlarged portions 22Aand 22B, in particular the enlarged portion 22A, and adapted to house atleast one material scrap 24A, deriving from the breaking of a respectivematerial bridge 24 due to the detachment of the contact probe 20 from asubstrate wherein the probe has been obtained, for instance by lasercutting.

Suitably, said indentation 23A can extend inside said enlarged portion22A or 22B by a length Lr equal to 5-30% of the length Lex, preferablywith values comprised between 5 μm and 15 μm.

It is thus immediately apparent that, even in the presence of such amaterial scrap 24A, the contact probe 20 according to the presentdisclosure has a head diameter Dt equal to that of the known solutions,the involved dimensions being equal, such a material scrap 24A notprojecting with respect to the footprint given by the contact head 20B.

In the most common applications, the length Lex of the undercut walls 22as and 22 bs has values comprised between 10 μm and 25 μm, the probediameter Ds has values comprised between 20 μm and 90 μm, and the headdiameter Dt has values comprised between 30 μm and 120 μm.

According to an alternative embodiment schematically shown in FIG. 6B,the contact head 20B of the contact probe 20 comprises respectiveindentations 23A and 23B realized in correspondence of both the enlargedportions 22A and 22B. Such indentations 23A and 23B allow housingrespective material scraps 24A in correspondence of respective andsymmetrical attachments of the contact head 20B to attachments materialbridges 24 of the contact probe 20 from a substrate wherein the probehas been obtained, for instance by laser cutting.

Also in this case, the presence of the indentations 23A and 23B ensuresthat the contact probe 20 according to the present disclosure has a headdiameter Dt equal to that of the known solutions, the involveddimensions being equal, also in the presence of material scraps 24A and24B not projecting with respect to the footprint given by the contacthead 20B.

Advantageously according to the present disclosure, it is thereforepossible to approach to each other adjacent contact probes 20 in theprobe head 30, anyway ensuring a minimum distance Dm which should elapsebetween the portions having the greatest dimensions of the probes, i.e.in correspondence of the relative contact heads 20B, without having tointroduce a tolerance to take into account the material scraps 24A; inparticular minimum distance Dm means a value adapted to avoid thecontact between adjacent probes, usually comprised between 10 μm and 20μm.

In this way the contact tips 20A of the contact probe 20 are also closeto each other, i.e., it is possible to approach the contact pads 26A ofthe device under test 26, or better the centers of said pads, to pitchvalues analogous to the known solutions, even in the presence of such amaterial scrap 24A.

It is obviously possible to realize any number of material bridges 24,also placed in a non-centered and/or non-symmetrical manner of thecontact head 20B of the contact probe 20 with respect to what is shownin FIGS. 6A and 6B, in a completely arbitrary manner.

It is thus possible to realize the contact probes 20 according to thepresent disclosure by defining them by laser cutting from a suitablesubstrate 25, realized with a material suitable for making contactprobes indeed. Each contact probe 20 is thus realized in a suitablesubstantially frame-like slot, simply indicated as frame 25A, obtainedin the substrate 25 by removing material and adapted to surround thecontact probe 20, as schematically shown in FIG. 7A.

More in particular, a plurality of contact probes 20 is realized, whichare anchored to the substrate 25 by at least one material bridge 24having an attachment point in correspondence of respective indentations23A realized in the contact heads 20B of such contact probes 20, inaccordance with the embodiment of FIG. 6A.

Alternatively, as schematically shown in FIG. 7B, it is possible torealize the plurality of contact probes 20 in the substrate 25 so thatthey have respective attachment points of the material bridges 24 incorrespondence of respective and symmetrical indentations 23A and 23Brealized in the contact heads 20B of said contact probes 20, inaccordance with the embodiment of FIG. 6B.

Therefore, the method comprises a further step of separating the contactprobes 20 from the substrate 25 by breaking the material bridge orbridges 24. Suitably, according to the present disclosure, such aseparation step of the contact probes 20 leaves material scraps 24Aand/or 24B each arranged inside a respective indentation 23A and/or 23B.

Suitably, as shown in FIGS. 7A and 7B, each material bridge 24 can beprovided with at least one weakening line LL which passes therethroughand which is adapted to facilitate the separation of the probe from thesubstrate 25 by breaking the integrity of the material bridge 24 itself.

In particular, such a weakening line LL can be arranged in proximity ofthe contact probe 20, so that the breaking thereof during the separationof the contact probe 10 from the substrate 25 involves a retention ofmost part of the material bridge 24 anchored to the substrate 25.

Suitably, the weakening lines LL can be obtained by means ofthrough-holes in the substrate 25, said through-holes can have anyshape, for instance round, oval, rectangular, inclined, just to citesome of them. Alternatively, the weakening lines LL can be realized bymeans of a local thinning of the substrate 25 in correspondence thereof,in a direction Z orthogonal to the plane of the substrate 25 itself.

According to an alternative embodiment of the contact probe 20 accordingto the present disclosure, schematically shown in FIG. 8, the contacthead 20B comprises only one enlarged portion 22A, only projecting incorrespondence of a side wall of the contact probe 20, in the shownexample in correspondence of the side wall PLa of the contact probe 20,arranged on the left of the probe itself, in the local reference of thefigure. On the contrary, in correspondence of a second and opposite facePLb, the contact head 20B does not have enlarged and projectingportions. In this way, the contact head 20B has an asymmetricalconfiguration, with respect to a longitudinal development axis HH of thecontact probe 20.

It should be pointed out that, also in this case, the contact head 20Bhas in this way an undercut wall 22 as, in correspondence of theenlarged portion 22A, adapted to abut onto a corresponding face of adie, in particular an upper die, preventing the contact probe 20 fromslipping out of the die and therefore out of the probe head, forinstance when the contact probe 20 does not abut onto a correspondingcontact pad and tends to slide downwards, considering the localreference of the figure. More in particular, the enlarged portion 22Adefines an undercut wall 22 as that can have a length Lex with a valueequal to 20-60% of the probe diameter Ds.

In this way, suitably according to this embodiment, the contact head 20Bhas a footprint diameter, in particular a head diameter Dt equal to thesum of the probe diameter Ds and of the length Lex: Dt=Ds+Lex, less, theinvolved dimensions being equal, than the head diameter Dt of theembodiments shown in FIGS. 6A and 6B and therefore also than that of theknown solutions.

Also in this case, the contact head 20B of the contact probe 20 furthercomprises at least one indentation 23A arranged in correspondence of theenlarged portion 22A, and adapted to house at least one material scrap24A, deriving from the breaking of a respective material bridge 24 dueto the detachment of the contact probe 20 from a substrate wherein theprobe has been obtained, for instance by laser cutting, without increasein the footprint thereof, in particular of the head diameter Dt.

Contact probes of the described type can be used to realize a probehead, as schematically shown in FIGS. 9A and 9B, wholly indicated withnumber reference 30.

In particular, the probe head 30 houses a plurality of contact probes 20and comprises at least one lower die 26 and an upper die 27, providedwith respective guide holes 26A and 27A wherein the contact probes 20 ofthe type previously described slide. For the sake of simplicity, inFIGS. 9A and 9B just a contact probe 20 is shown, respectively of thetype described in FIGS. 6B and 8.

Each contact probe 20 has the contact tip 20A adapted to abut onto acorresponding contact pad 28A of a device under test 28 and the probehead 20B adapted to abut onto a contact pad 29A of a space transformer29.

In the shown example, the probe head 30 is of the type having verticalprobes and shifted plates; the shown probe comprises the probe body 20Cwhich extends in an air gap ZA, between the upper die 27 and the lowerdie 26. As previously, for the sake of convenience, the terms “upper”and “lower” have been used in connection to a local reference system ofthe figure, without considering them in a limiting way for thedisclosure.

In particular, the lower and upper dies, 26 and 27, are mutuallysuitably shifted so as to impart to said contact probes 20 which slidein their guide holes 26A and 27A, a pre-deformation in correspondence ofthe air gap ZA between the dies, such a pre-deformation increasingduring the operation of the probe head 30, when the contact tips 20A ofthe contact probes 20 are in a pressing contact onto the contact pads28A of the device under test 28 and the contact probes 20 bend incorrespondence of the air gap ZA.

The contact probes 20 have sections, in particular in correspondence ofthe probe body 20C, having a diameter that varies from 0.8 mils to 3mils, selected based on the applications which the probe head 30 isintended to, whereas the probe heads 20B, provided with the enlargedportions 22A and/or 22B, have sections having a diameter that variesfrom 1 mils to 3.5 mils, diameter meaning the maximum dimension of suchcross-sections that are not necessarily circular.

It should be pointed out that, in the shifted-plate configuration shownin FIG. 9B, the contact probes 20 are housed in the probe head 30 so asto have the enlarged portion 22A projecting from a wall of the contactprobe 20, in the example the wall PLa resting on a wall of the guidehole 27A of the upper die 27 underneath it.

In this way, the undercut wall 22 as of the enlarged portion 22A isadapted to abut onto a first face of the upper guide 27, in particularthe face in front of the space transformer 29, indicated as upper face27 s, still using the local reference of the figure; moreover, the upperdie 27 has a second and opposite face, indicated as lower face 27 i.

Advantageously according to the present disclosure, thanks to theconfiguration of the contact probe 20 of the embodiment shown in FIG. 8,it is possible to approach one another adjacent contact probes 20 in theprobe head 30, anyway ensuring a minimum distance Dm that should elapsebetween the portions having the greatest dimensions of the probes, i.e.in correspondence of the relative probe heads 20B, as schematicallyshown in FIG. 10A, where minimum distance Dm always means a valueadapted to avoid the contact between adjacent probes, usually comprisedbetween 10 μm and 20 μm.

Obviously, in this way the contact tips 20A of the contact probe 20 areapproached, i.e. it is possible to approach the contact pads 26A of thedevice under test 26, or better the centers of such pads by reducing thepitch P1*; in other terms, in this way it is advantageously possible totest a device having a pitch P1* less than the embodiments of thecontact probe 20 shown in FIGS. 6A and 6B and therefore also of theknown solutions.

According to an alternative embodiment, schematically shown in FIG. 10B,inside the probe head 30, it is also possible to arrange the contactprobes 20 so that adjacent probes 20, 20′ in a longitudinal ortransverse direction have enlarged portions 22A, 22′A projecting fromopposite walls PLa, PL′b. In this way, a first probe 20 comprises aprojecting portion 22A that projects from a first wall thereof PLa and asecond probe 20′, adjacent to the first probe 20 in a longitudinal ortransverse direction, comprises a respective projecting portion 22′Athat projects from a second and opposite wall PL′b thereof; in otherterms, adjacent probes 20, 20′ have enlarged portions 22A, 22′Aprojecting from opposite sides with respect to such a longitudinal ortransverse direction of the probes flanking.

In this way it is possible to further approach adjacent probes, inparticular in correspondence of the contact heads thereof, thoughensuring the minimum distance Dm adapted to avoid possible contactsbetween the probes. Therefore, the centers of said pads are also furtherapproached, with a consequent further reduction of the pitch P1*, asindicated in the figure.

It is also pointed out that, advantageously according to the disclosure,the probe head proposed allows reducing the pitch P1* of the deviceunder test 28, namely approaching the centers of the correspondingcontact pads 28A, up to the requirements requested by the most modernintegration and design technologies of integrated circuits.

A particularly advantageous embodiment of the probe head 30 according tothe present disclosure is schematically shown in FIG. 11.

The probe head 30 in particular comprises a plurality of contact probes20 having probe heads 20B provided with enlarged portions 22A and 22Bprojecting from both side walls of the probe, as in the embodiments ofFIGS. 6A and 6B (the latter being the one shown in FIG. 11 by way ofexample), indicated in the following as symmetrical contact probes 20,along with a plurality of contact probes, indicated with referencenumber 20″ with probe heads 20″B provided with only one enlarged portion22″A projecting from only one side wall, in particular the first wallPL″a, indicated in the following as asymmetrical contact probes 20″.

As previously, the enlarged portions 22A and/or 22B and 22″A compriserespective indentations 23A and/or 23B and 23″A adapted to house thematerial scraps 24A, 24″A due to the separation of the contact probes20, 20″ from a substrate 25 wherein they were formed.

In the example shown in the figure, the probe head 20 is of theshifted-plates type and therefore comprises the lower die 26 and theupper die 27, planar and parallel to each other and provided withfurther respective guide holes, 26B and 27B, within which theasymmetrical contact probes 20″ are slidingly housed.

More in particular, each asymmetrical contact probe 20″ comprises acontact head 20″B adapted to abut onto further contact pads 29B of thespace transformer 29, as well as a contact tip 20″A adapted to abut ontofurther contact pads 28B of the device under test 28.

It is pointed out that the asymmetrical contact probes 20″ have amaximum footprint, in particular a head diameter Dt less than acorresponding head diameter of the symmetrical contact probes 20. Inthis way it is thus possible to test integrated devices having regionswith different pitches by means of the same probe head 30 made as shownin FIG. 11.

It is in fact known that the most recent developments in the technologyfor realizing integrated circuits allowed to realize devices withbidimensional arrays of contact pads having relative distances or pitchdifferent in various regions of the device itself. More in particularsuch a device comprises a first region, indicated as region with a bigpitch, wherein the contact pads have a greater distance between therelative centers with respect to a second region, indicated as regionwith a small pitch, wherein the pads are closer to each other. In thiscase we can talk about multi-pitch devices.

Suitably, the probe head 30 according to the present disclosure as shownin FIG. 11 allows testing such devices, in particular using thesymmetrical contact probes 20 in the first region with a big pitch andthe asymmetrical contact probes 20″ in the second region with a smallpitch for testing multi-pitch devices.

The considerations made are also valid for different embodiments herenot disclosed, but however subject matter of the present disclosure,such as, for instance, a probe head having an upper die and/or a lowerdie comprising several supports. Furthermore, the measures taken inconnection with an embodiment can be also used for other embodiments andcan be freely combined with each other also in a number greater thantwo.

In conclusion, the configuration of the contact probe and thecorresponding probe head according to the embodiments of the disclosureallow realizing a high packing of the probes themselves and thereforetesting configurations of contact pads also very close to each other,the limit being given by their enlarged head portions not having to takeinto account possible material scraps left by the separation of theprobes from a substrate where they have been realized.

In this way, advantageously according to the disclosure, it is possibleto realize the probes by using the most modern laser technologies,overcoming the limits of other technologies also in the case ofintegrated devices under test with a very small pitch, i.e. with thecenters of the corresponding contact pads very close to each other, inparticular up to the requirements requested by the most modernintegration and design technologies of integrated circuits.

In the alternative embodiment with asymmetrical probe heads, it is evenpossible to increase the packing of such probes thanks to the reducedfootprint of the corresponding head portions having enlarged portionsonly projecting from a side wall of the probe.

The advantage connected to the fact that the contact probes are realizedin a simple manner and with low costs, in particular by using the lasertechnology, is not to be ignored.

In a preferred embodiment, the probe head according to the presentdisclosure also allows testing multi-pitch devices.

From the foregoing it will be appreciated that, although specificembodiments of the disclosure have been described herein for purposes ofillustration, various modifications may be made without deviating fromthe spirit and scope of the disclosure.

The various embodiments described above can be combined to providefurther embodiments. These and other changes can be made to theembodiments in light of the above-detailed description. In general, inthe following claims, the terms used should not be construed to limitthe claims to the specific embodiments disclosed in the specificationand the claims, but should be construed to include all possibleembodiments along with the full scope of equivalents to which suchclaims are entitled. Accordingly, the claims are not limited by thedisclosure.

1. A contacting element comprising: respective first and second endportions, and a body extended in a longitudinal direction between thefirst and second end portions, the first end portion having transversedimensions greater than the body, the contacting element comprisingmaterial scraps due to a separation from a substrate wherein thecontacting element is realized, wherein the first end portion comprisesat least one indentation apt to house the material scraps being on thecontacting element.
 2. The contacting element according to claim 1,wherein the first end portion is a contact head apt to abut onto acontact pad of a space transformer and the second end portion is acontact tip apt to abut onto a contact pad of a device under test. 3.The contacting element according to claim 1, further comprising a firstenlarged portion, projecting only in correspondence of a first side wallof the contacting element and defining a first undercut wall apt to abutonto a corresponding face of a guide housing the contacting element. 4.The contacting element according to claim 3, comprising a secondenlarged portion, projecting in correspondence of a second side wall ofthe contacting element opposite to the first side wall and defining asecond undercut wall.
 5. The contacting element according to claim 4,wherein the at least one indentation includes a first indentation and asecond indentation which extend inside the first enlarged portion andsecond enlarged portion respectively.
 6. The contacting elementaccording to claim 1, wherein the material scraps are in correspondenceof a weakening line which passes through a material bridge and is apt tofacilitate separation of the contacting element from the substrate bybreaking the material bridge.
 7. The contacting element according toclaim 6, wherein the weakening line is arranged on the bridge ofmaterial in proximity of the contacting element at the at least oneindentation.
 8. A probe head for testing electronic devices comprising:a plurality of contact probes, a first and second plate-shaped supportsseparated from one another by a suitable air gap, the first and secondplate-shaped supports having a plurality of guide holes for slidinglyhousing the plurality of contact probes, wherein each contact probecomprises: respective first and second end portions, and a probe bodyextended in a longitudinal direction between the first and second endportions, the first end portion having transverse dimensions greaterthan the probe body, the contact probe comprising material scraps due toa separation from a substrate wherein the contact probe is realized andthe first end portion comprising at least one indentation apt to housethe material scraps on the contact probe.
 9. The probe head according toclaim 8, wherein the first end portion of each contact probe is acontact head apt to abut onto a contact pad of a space transformer andthe second end portion of each contact probe is a contact tip apt toabut onto a contact pad of a device under test
 10. The probe headaccording to claim 8, wherein each contact probe further comprises afirst enlarged portion, projecting only in correspondence of a firstside wall of the contact probe and defining a first undercut wall apt toabut onto a corresponding face of the plate-shaped support housing thecorresponding contact probe.
 11. The probe head according to claim 10,wherein each contact probe comprises a second enlarged portion,projecting in correspondence of a second side wall of the probe contactopposite to the first side wall and defining a second undercut wall. 12.The probe head according to claim 11, wherein the at least oneindentation of each contact probe comprises first and secondindentations extending inside the first enlarged portion and secondenlarged portion respectively.
 13. The probe head according to claim 12,wherein the material scraps of each contact probe are in correspondenceof a weakening line which passes through a material bridge and is apt tofacilitate separation of the contact probe from the substrate bybreaking the material bridge, the weakening line being arranged on thebridge of material in proximity of the respective contact probe at theindentation.
 14. The probe head according to claim 8, wherein theplate-shaped supports are mutually suitably shifted so as to impart tothe contact probes, which slide in the respective guide holes, apre-deformation in correspondence of the air gap, wherein an enlargedportion of the first end portion of each of the contact probes protrudesfrom a wall of the contact probe, which rests on a wall of the guidehole of the first plate-shaped support in proximity of the first endportion.
 15. The probe head according to claim 14, wherein the enlargedportion defines an undercut wall apt to abut onto a first face of thefirst plate-shaped support.
 16. The probe head according to claim 15,wherein the plurality of contact probes include adjacent probes in alongitudinal or transverse direction with enlarged portions projectingfrom a corresponding wall.
 17. The probe head according to claim 14,further comprising a plurality of symmetrical contact probes, havingcontact heads which comprise enlarged portions projecting from sidewalls of the contact probe and a plurality of asymmetrical contactprobes, having contact heads which comprise only one enlarged portionprojecting from only one side wall of the contact probe, the enlargedportions comprising respective indentations adapted to house materialscraps due to a separation of the contact probes from a substratewherein the contact probes were formed, the symmetrical contact probesbeing configured to be arranged in abutment onto contact pads in a firstregion of the device under test and the asymmetrical contact probesbeing configured to be arranged in abutment onto contact pads in asecond region of the device under test, the first region having agreater pitch than the second region.
 18. A contact probe comprising:respective first and second end portions, a probe body extended in alongitudinal direction between the first and second end portions, and afirst side wall and a second side wall, opposite one another, the firstend portion is a contact head apt to abut onto a contact pad of a spacetransformer and the second end portion is a contact tip apt to abut ontoa contact pad of a device under test and the first end portion havingtransverse dimensions greater than the probe body, the contact probecomprising material scraps due to a separation from a substrate whereinthe contact probe is realized by laser cutting, wherein the first endportion comprises at least one indentation apt to house the materialscraps being on the contact probe.
 19. The contact probe according toclaim 18, further comprising a first enlarged portion, projecting onlyin correspondence of the first side wall of the contact probe anddefining a first undercut wall apt to abut onto a corresponding face ofa guide housing the contact probe.
 20. The contact probe according toclaim 19, comprising a second enlarged portion, projecting incorrespondence of the second side wall of the probe and defining asecond undercut wall.
 21. The contact probe according to claim 20,wherein the at least one indentation includes a first indentation and asecond indentation which extend inside the first enlarged portion andsecond enlarged portion respectively.
 22. The contact probe according toclaim 18, wherein said material scraps are in correspondence of aweakening line which passes through a material bridge and is apt tofacilitate the separation of the contact probe from the substrate bybreaking the material bridge.
 23. The contact probe according to claim22, wherein the weakening line is arranged on the bridge of material inproximity of the contact probe at the at least one indentation.
 24. Aprobe head for testing electronic devices comprising: a plurality ofcontact probes, a first and second plate-shaped supports separated fromone another by a suitable air gap, the first and second plate-shapedsupports having a plurality of guide holes for slidingly housing theplurality of contact probes, wherein each contact probe comprises:respective first and second end portions, a probe body extended in alongitudinal direction between the first and second end portions, and afirst side wall and a second side wall, opposite one another, the firstend portion is a contact head apt to abut onto a contact pad of a spacetransformer and the second end portion is a contact tip apt to abut ontoa contact pad of a device under test and the first end portion havingtransverse dimensions greater than the probe body, the contact probecomprising material scraps due to a separation from a substrate whereinthe contact probe is realized by laser cutting and the first end portioncomprising at least one indentation apt to house the material scraps onthe contact probe.
 25. The probe head according to claim 24, furthercomprising a plurality of symmetrical contact probes, having contactheads which comprise enlarged portions projecting from both the sidewalls of the contact probe and a plurality of asymmetrical contactprobes, having contact heads which comprise only one enlarged portionprojecting from only one side wall of the contact probe, the enlargedportions comprising respective indentations adapted to house materialscraps due to a separation of the contact probes from a substratewherein the contact probes were formed, the symmetrical contact probesbeing configured to be arranged in abutment onto contact pads in a firstregion of the device under test and the asymmetrical contact probesbeing configured to be arranged in abutment onto contact pads in asecond region of the device under test, the first region having agreater pitch than the second region.